Flexibility studies on ultra-thin silicon substrates
Conference Paper
(2005)
Author(s)
L. . Wang (External organisation)
M. Bartek (TU Delft - Old - EWI Ch. Integrated Sensing Devices)
A Polyakov (TU Delft - Old - EWI Ch. Integrated Sensing Devices)
Kaspar Jansen (TU Delft - Dynamics of Micro and Nano Systems)
LJ Ernst (TU Delft - Dynamics of Micro and Nano Systems)
Research Group
Old - EWI Ch. Integrated Sensing Devices
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https://resolver.tudelft.nl/uuid:8a0a9025-064d-4f15-a666-dc5ed7eb7771
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Publication Year
2005
Research Group
Old - EWI Ch. Integrated Sensing Devices
Pages (from-to)
175-180
ISBN (print)
90-73461-50-2
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