Multi-Beam Scanning Electron Microscope Design
Journal Article
(2016)
Author(s)
Pieter Kruit (TU Delft - ImPhys/Charged Particle Optics)
Yan Ren (TU Delft - ImPhys/Charged Particle Optics)
Research Group
ImPhys/Charged Particle Optics
DOI related publication
https://doi.org/10.1017/S143192761600372X
Final published version
To reference this document use
https://resolver.tudelft.nl/uuid:8aaaa0fe-d124-47e3-bfbf-63db45a98403
More Info
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Publication Year
2016
Language
English
Research Group
ImPhys/Charged Particle Optics
Issue number
S3
Volume number
22
Pages (from-to)
574-575
Downloads counter
86