YR

Y. Ren

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The goal of this Ph.D. research is to develop imaging systems for the multiple beam scanning electron microscope (MBSEM) built in Delft University of Technology. This thesis includes two imaging systems, transmission electron (TE) imaging system, and secondary electron (SE) imagi ...
Recently we have proposed a new Multi-beam Scanning Electron Microscope (MBSEM) which potentially offers a higher current than a single beam SEM. In this system the primary electron beam is first separated into 196 beams by an Aperture Lens Array and then focused into one single ...

Our group is developing a multibeam scanning electron microscope (SEM) with 196 beams in order to increase the throughput of SEM. Three imaging systems using, respectively, transmission electron detection, secondary electron detection, and backscatter electron detection are de ...