Imaging systems in the Delft Multi-Beam Scanning Electron Microscope 1

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doi:10.4233/uuid:e25ff43d-b8ae-4b6c-9bc9-d10768c4ab11

Imaging systems in the Delft Multi-Beam Scanning Electron Microscope 1

Doctoral Thesis (2017)

Author(s)

Yan Ren (TU Delft - ImPhys/Charged Particle Optics)

Contributor(s)

Pieter Kruit – Promotor (TU Delft - ImPhys/Charged Particle Optics)

Multi-beam SEM (MBSEM) Transmission electron imaging Secondary electron imaging

DOI related publication

https://doi.org/10.4233/uuid:e25ff43d-b8ae-4b6c-9bc9-d10768c4ab11 Final published version

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https://doi.org/10.4233/uuid:e25ff43d-b8ae-4b6c-9bc9-d10768c4ab11

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Publication Year

2017

Language

English

ISBN (print)

9789462957114

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402

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Abstract

The goal of this Ph.D. research is to develop imaging systems for the multiple beam scanning electron microscope (MBSEM) built in Delft University of Technology. This thesis includes two imaging systems, transmission electron (TE) imaging system, and secondary electron (SE) imaging system. The major conclusions, key results and some suggestions for future improvements are highlighted in this chapter.

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