Numerical gas flow and heat transfer simulation in the ASM Epsilon 2000 CVD reactor for Pure Boron deposition
Journal Article
(2014)
Author(s)
V. Mohammadi (TU Delft - Electronic Components, Technology and Materials)
Saeide Mohammadi (External organisation)
S Ramesh (External organisation)
S. Nihtianova (TU Delft - Electronic Instrumentation)
Research Group
Electronic Components, Technology and Materials
To reference this document use:
https://resolver.tudelft.nl/uuid:8ac83356-5900-4631-a444-5e479a60df77
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Publication Year
2014
Language
English
Research Group
Electronic Components, Technology and Materials
Volume number
8
Pages (from-to)
28-31
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