Novel Design Methods for High-Quality Lithographic Objectives.
Doctoral Thesis
(2006)
Author(s)
OE Marinescu (TU Delft - ImPhys/Optics)
Research Group
ImPhys/Optics
To reference this document use:
https://resolver.tudelft.nl/uuid:8c232e36-c20f-4817-89e2-5f676d16ef63
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Publication Year
2006
Research Group
ImPhys/Optics
ISBN (print)
90-78314-02-8
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