Saddle-point construction in the design of lithographic objectives, part 1, method.

Saddle-point construction in the design of Lithographic objectives, part 2: application

Optimization of extreme ultraviolet mirror systems comprising high-order aspheric surfaces

Network search method in the design of EUV lithographic objectives

Practical guide to saddle-point construction in lens design.

Novel Design Methods for High-Quality Lithographic Objectives.

Designing lithographic objectives by constructing saddle points.

Designing optics by using the order in the merit function space.

The network structure of the merit function space of EUV mirror systems

Saddle point in the merit function landscape of lithographic objectives

Avoiding unstable regions in the design space of EUV mirror systems comprising high-order aspheric surfaces