O

OE Marinescu

11 records found

Optimization of extreme ultraviolet mirror systems comprising high-order aspheric surfaces

Saddle-point construction in the design of lithographic objectives, part 1, method.

Saddle-point construction in the design of Lithographic objectives, part 2: application

Network search method in the design of EUV lithographic objectives

Practical guide to saddle-point construction in lens design.

Designing lithographic objectives by constructing saddle points.

Designing optics by using the order in the merit function space.

Novel Design Methods for High-Quality Lithographic Objectives.
Doctoral thesis (2006) - OE Marinescu (author)

The network structure of the merit function space of EUV mirror systems

Saddle point in the merit function landscape of lithographic objectives

Avoiding unstable regions in the design space of EUV mirror systems comprising high-order aspheric surfaces