Saddle point in the merit function landscape of lithographic objectives
Journal Article
(2005)
Author(s)
OE Marinescu (TU Delft - ImPhys/Optics)
F Bociort (TU Delft - ImPhys/Optics)
JJM Braat (TU Delft - ImPhys/Optics)
Research Group
ImPhys/Optics
To reference this document use:
https://resolver.tudelft.nl/uuid:355237e6-d8f3-417b-a8ee-cbccc84ff300
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Publication Year
2005
Research Group
ImPhys/Optics
Volume number
5962
Pages (from-to)
221-228
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