Avoiding unstable regions in the design space of EUV mirror systems comprising high-order aspheric surfaces
Journal Article
(2004)
Author(s)
OE Marinescu (TU Delft - ImPhys/Optics)
F Bociort (TU Delft - ImPhys/Optics)
JJM Braat (TU Delft - ImPhys/Optics)
Research Group
ImPhys/Optics
To reference this document use:
https://resolver.tudelft.nl/uuid:0675fe68-5e64-4792-b2f0-8ef640407217
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Publication Year
2004
Research Group
ImPhys/Optics
Volume number
5523
Pages (from-to)
185-192
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