Network search method in the design of EUV lithographic objectives

Journal Article (2007)

Author(s)

OE Marinescu (TU Delft - ImPhys/Optics)

F. Bociort (TU Delft - ImPhys/Optics)

Research Group

ImPhys/Optics

CWTS 0.75 <= JFIS < 2.00 Professional journal papers

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Publication Year

2007

Research Group

ImPhys/Optics

Volume number

46

Pages (from-to)

8385-8393

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