Saddle-point construction in the design of Lithographic objectives, part 2: application

Optimization of extreme ultraviolet mirror systems comprising high-order aspheric surfaces

Saddle-point construction in the design of lithographic objectives, part 1, method.

Practical guide to saddle-point construction in lens design.

Network search method in the design of EUV lithographic objectives

Designing optics by using the order in the merit function space.

Designing lithographic objectives by constructing saddle points.

Novel Design Methods for High-Quality Lithographic Objectives.

Saddle point in the merit function landscape of lithographic objectives

The network structure of the merit function space of EUV mirror systems

Avoiding unstable regions in the design space of EUV mirror systems comprising high-order aspheric surfaces