A silicon MEMS structure for characterization of femto-farad-level capacitive sensors with lock-in architecture

Journal article (2010)

Authors

J. Wei Electronic Components, Technology and Materials - EEMCS
C Yue External organisation
ZL Chen External organisation
ZW Liu External organisation
Pasqualina M Sarro Electronic Components, Technology and Materials - EEMCS
Research Group
Electronic Components, Technology and Materials (EEMCS) (TU Delft)
Elektrotechniek Techniek
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Published Date

2010

Language

English

Reuse Rights

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Faculty

Electrical Engineering, Mathematics and Computer Science

Department

Microelectronics

Research Group

Electronic Components, Technology and Materials