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ZL Chen
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3 records found
A silicon MEMS structure for characterization of femto-farad-level capacitive sensors with lock-in architecture
Journal article -
J. Wei
,
C Yue
,
ZL Chen
,
ZW Liu
,
Pasqualina M Sarro
Characterization of Femto-Farad-Level Capacitive MEMS Sensors using Lock-in Architecture
Conference paper -
C Yue
,
J. Wei
,
ZL Chen
,
ZW Liu
,
Pasqualina M Sarro
Implementation and Characterization of a femto-Farad Capacitive Sensor for pico-Liter Liquid Monitoring
Conference paper -
J. Wei
,
C Yue
,
ZL Chen
,
ZW Liu
,
K.A.A. Makinwa
,
Pasqualina M Sarro