Characterization of Femto-Farad-Level Capacitive MEMS Sensors using Lock-in Architecture

Conference paper (2009)

Authors

C Yue External organisation
J. Wei Electronic Components, Technology and Materials - EEMCS
ZL Chen External organisation
ZW Liu External organisation
Pasqualina M Sarro Electronic Components, Technology and Materials - EEMCS
Research Group
Electronic Components, Technology and Materials (EEMCS) (TU Delft)
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Published Date

2009

Language

Undefined/Unknown

Reuse Rights

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Faculty

Electrical Engineering, Mathematics and Computer Science

Department

Microelectronics

Research Group

Electronic Components, Technology and Materials