Characterization of Femto-Farad-Level Capacitive MEMS Sensors using Lock-in Architecture
Conference Paper
(2009)
Author(s)
C Yue (External organisation)
J Wei (TU Delft - Electronic Components, Technology and Materials)
ZL Chen (External organisation)
ZW Liu (External organisation)
Pasqualina M. Sarro (TU Delft - Electronic Components, Technology and Materials)
Research Group
Electronic Components, Technology and Materials
To reference this document use:
https://resolver.tudelft.nl/uuid:e4623473-1380-44e2-830b-793793116dd0
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Publication Year
2009
Research Group
Electronic Components, Technology and Materials
Pages (from-to)
1-4
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