Coherent Fourier Scatterometry for detection of nanometer-sized particles on a planar substrate surface.
Journal Article
(2014)
Author(s)
S. Roy (TU Delft - ImPhys/Optics)
A. da Costa Assafrao (TU Delft - ImPhys/Optics)
Silvania Pereira (TU Delft - ImPhys/Optics)
H. Paul Urbach (TU Delft - ImPhys/Optics)
Research Group
ImPhys/Optics
To reference this document use:
https://resolver.tudelft.nl/uuid:8da01a4d-7113-4e9a-b68d-4de046e207da
More Info
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Publication Year
2014
Language
English
Research Group
ImPhys/Optics
Issue number
11
Volume number
22
Pages (from-to)
13250-13262
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