Thermal budget considerations for excimer laser annealing of implanted dopants

Journal article (2010)

Authors

V Gonda Old - EWI Sect. ECTM
J Venturini External organisation
C Sabatier External organisation
J. van der Cingel Electronic Components, Technology and Materials - EEMCS
L.K. Nanver Electronic Components, Technology and Materials - EEMCS
Research Group
Old - EWI Sect. ECTM
More Info
expand_more

Published Date

2010

Language

English

Reuse Rights

Other than for strictly personal use, it is not permitted to download, forward or distribute the text or part of it, without the consent of the author(s) and/or copyright holder(s), unless the work is under an open content license such as Creative Commons.

Research Group

Old - EWI Sect. ECTM