Thermal budget considerations for excimer laser annealing of implanted dopants
Journal Article
(2010)
Authors
V Gonda (Old - EWI Sect. ECTM)
J Venturini (External organisation)
C Sabatier (External organisation)
J van der Cingel (TU Delft - Electronic Components, Technology and Materials)
LK Nanver (TU Delft - Electronic Components, Technology and Materials)
Research Group
Old - EWI Sect. ECTM
To reference this document use:
https://resolver.tudelft.nl/8da7431e-ea8b-4cd8-97ed-6589cb8636d5
More Info
expand_more
expand_more
Publication Year
2010
Language
English
Research Group
Old - EWI Sect. ECTM
Issue number
3
Volume number
12
Pages (from-to)
466-469
No files available
Metadata only record. There are no files for this record.