Three-dimensional rigorous simulation of mask induced polarization

Journal article (2005)

Authors

X Wei ImPhys/Optics - AS
Paul Urbach ImPhys/Optics - AS
Y Aksenov External organisation
AJH Wachters External organisation
Research Group
ImPhys/Optics (AS) (TU Delft)
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Published Date

2005

Language

Undefined/Unknown

Reuse Rights

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Faculty

Applied Sciences

Department

ImPhys/Imaging Physics

Research Group

ImPhys/Optics