Three-dimensional rigorous simulation of mask induced polarization
Journal Article
(2005)
Author(s)
X Wei (TU Delft - ImPhys/Optics)
Paul Urbach (TU Delft - ImPhys/Optics)
Y Aksenov (External organisation)
AJH Wachters (External organisation)
Research Group
ImPhys/Optics
To reference this document use:
https://resolver.tudelft.nl/uuid:908bfc49-5fcc-4e5f-96d2-cfbe96ab4909
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Publication Year
2005
Research Group
ImPhys/Optics
Volume number
5754
Pages (from-to)
567-575
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