YA

Y Aksenov

2 records found

Authored

Influence of mask induced polarization effects on a pattern printability
Journal article (2005) - Y Aksenov, P. Dirksen, X Wei, P Zandbergen

Three-dimensional rigorous simulation of mask induced polarization
Journal article (2005) - X Wei, Paul Urbach, Y Aksenov, AJH Wachters