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Estimating resist parameters in optical lithograpgy using the extended Nijboer-Zernike theory

Journal article - P. Dirksen, J.J.M. Braat, AJEM Janssen

Energy and angular momentum flux in a high-numerical-aperture imaging system using the extended Nijboer-Zernike theory.

Journal article - S. van Haver, J.J.M. Braat, A.J.E.M. Jansen, P. Dirksen

High-NA aberration retrieval with extended Nijboer-Zernike vector diffraction theory: Erratum

Journal article - S. van Haver, J.J.M. Braat, P. Dirksen, AJEM Janssen

Observations on the Optical Point Spread Function of a Lithographic Projection Lens

Conference paper - P. Dirksen, J.J.M. Braat, P. de Bisschop, A Janssen, C. Juffermans, A. Williams

Aberration retrieval for high-NA optical systems using the extended Nijboer-Zernike theory

Journal article - P. Dirksen, J.J.M. Braat, AJEM Janssen, A Leeuwenstein

Extended Nijboer-Zernike (ENZ) based evaluation of amplitude and phase aberrations on scaled and annual pupils.

Conference paper - S. van Haver, AJEM Janssen, P. Dirksen, J.J.M. Braat

Through-Focus Point-Spread Function Evaluation fro Lens Metrology using the extended Nijboer-Zernike Theory

Conference paper - J.J.M. Braat, P. Dirksen, AJEM Janssen

Extended Nijboer-Zernike representation of the field in the focal region of an aberrated high-aperture optical system

Journal article - J.J.M. Braat, P. Dirksen, AJEM Janssen, A.S. van de Nes

On the computation of the Nijboer-Zernike aberration intergrals at arbitrary defocus

Journal article - AJEM Janssen, J.J.M. Braat, P. Dirksen

High-NA aberration retrieval with the extended Nijboer-Zernike vector diffraction theory.

Journal article - S. van Haver, J.J.M. Braat, P. Dirksen, AJEM Janssen

Assessment of optical systems by means of point-spread functions.

Book chapter - J.J.M. Braat, S. van Haver, AJEM Janssen, P. Dirksen

Experimental determination of lens abberations from the intensity pointspread function in the focal region

Journal article - P. Dirksen, J.J.M. Braat, C. Juffermans, A Leeuwestein

Influence of mask induced polarization effects on a pattern printability

Journal article - Y Aksenov, P. Dirksen, X Wei, P Zandbergen

Strehl ratio and optimum focus of high-numerical-aperture beams.

Journal article - AJEM Janssen, S. van Haver, J.J.M. Braat, P. Dirksen

Abberation retrieval from the intensity points-spread function in the focal region using the extended

Journal article - C van der Avoort, J.J.M. Braat, P. Dirksen, AJEM Janssen

Aerial image based lens metrology for wafer steppers.

Journal article - P. Dirksen, J.J.M. Braat, AJEM Janssen, A Leeuwestein, T Matsuyama, T Noda

High-NA lens characterization by through-focus intensity measurement

Conference paper - S. van Haver, J.J.M. Braat, P. Dirksen, AJEM Janssen

Assessment of an extended Nijboer-Zernike approach for the computation of optical point-spread functions

Journal article - J.J.M. Braat, P. Dirksen, A.J.E.M. Jansen

Aberration retrieval using the extended Nijboer-Zernike approach

Journal article - P. Dirksen, J.J.M. Braat, AJEM Janssen, C. Juffermans

Determination of resist parameters using the extended Nijboer-Zernike theory.

Journal article - P. Dirksen, J.J.M. Braat, AJEM Janssen, A Leeuwestein, H Kwinten, D van Steenwinckel

P. Dirksen

Authored