Assessment of optical systems by means of point-spread functions.

Zernike representation and Strehl ratio op optical systems with variable numerical aperture.

Analytic expressions and approximations for the on-axis, aberration-free Rayleigh and Debye intergral in the case of focusing fields on a circular aperture.

Strehl ratio and optimum focus of high-numerical-aperture beams.

High-NA aberration retrieval with extended Nijboer-Zernike vector diffraction theory: Erratum

Energy and angular momentum flux in a high-numerical-aperture imaging system using the extended Nijboer-Zernike theory.

Extended Nijboer-Zernike (ENZ) based evaluation of amplitude and phase aberrations on scaled and annual pupils.

Aerial image based lens metrology for wafer steppers.

Estimating resist parameters in optical lithograpgy using the extended Nijboer-Zernike theory

High-NA lens characterization by through-focus intensity measurement

High-NA aberration retrieval with the extended Nijboer-Zernike vector diffraction theory.

Abberation retrieval from the intensity points-spread function in the focal region using the extended

Through-Focus Point-Spread Function Evaluation fro Lens Metrology using the extended Nijboer-Zernike Theory

Extended Nijboer-Zernike approach to aberration and birefringence retrieval in a high-numerical-aperture optical system

Aberration retrieval for high-NA optical systems using the extended Nijboer-Zernike theory

Influence of mask induced polarization effects on a pattern printability

Polarisation-aberration retrieval for high-NA systems using the extended Nijboer-Zernike diffraction theory.

Determination of resist parameters using the extended Nijboer-Zernike theory.

On the computation of the Nijboer-Zernike aberration intergrals at arbitrary defocus

Experimental determination of lens abberations from the intensity pointspread function in the focal region