Determination of resist parameters using the extended Nijboer-Zernike theory.
Journal Article
(2004)
Author(s)
P. Dirksen (External organisation)
JJM Braat (TU Delft - ImPhys/Optics)
AJEM Janssen (External organisation)
A Leeuwestein (External organisation)
H Kwinten (External organisation)
D van Steenwinckel (External organisation)
Research Group
ImPhys/Optics
To reference this document use:
https://resolver.tudelft.nl/uuid:0a0e2524-44fb-4151-9a0e-e4ffad449e7b
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Publication Year
2004
Research Group
ImPhys/Optics
Volume number
5377
Pages (from-to)
150-159
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