A Leeuwestein | TU Delft Repository

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A Leeuwestein

Journal article (3)

3 records found

1

Aerial image based lens metrology for wafer steppers.

Journal article (2006) - P. Dirksen (author) , JJM Braat (author) , AJEM Janssen (author) , A Leeuwestein (author) , T Matsuyama (author) , T Noda (author)

Determination of resist parameters using the extended Nijboer-Zernike theory.

Journal article (2004) - P. Dirksen (author) , J.J.M. Braat (author) , AJEM Janssen (author) , A Leeuwestein (author) , H Kwinten (author) , D van Steenwinckel (author)

Experimental determination of lens abberations from the intensity pointspread function in the focal region

Journal article (2003) - P. Dirksen (author) , J.J.M. Braat (author) , C. Juffermans (author) , A Leeuwestein (author)