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C. Juffermans

Conference paper (1)

Journal article (2)

3 records found

1

Aberration retrieval using the extended Nijboer-Zernike approach

Journal article (2003) - P. Dirksen (author) , Joseph Braat (author) , AJEM Janssen (author) , C. Juffermans (author)

Experimental determination of lens abberations from the intensity pointspread function in the focal region

Journal article (2003) - P. Dirksen (author) , Joseph Braat (author) , C. Juffermans (author) , A Leeuwestein (author)

Observations on the Optical Point Spread Function of a Lithographic Projection Lens

Conference paper (2002) - P. Dirksen (author) , Joseph Braat (author) , P. de Bisschop (author) , A Janssen (author) , C. Juffermans (author) , A. Williams (author)