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C. Juffermans
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3 records found
Observations on the Optical Point Spread Function of a Lithographic Projection Lens
Conference paper -
P. Dirksen
,
J.J.M. Braat
,
P. de Bisschop
,
A Janssen
,
C. Juffermans
,
A. Williams
Experimental determination of lens abberations from the intensity pointspread function in the focal region
Journal article -
P. Dirksen
,
J.J.M. Braat
,
C. Juffermans
,
A Leeuwestein
Aberration retrieval using the extended Nijboer-Zernike approach
Journal article -
P. Dirksen
,
J.J.M. Braat
,
AJEM Janssen
,
C. Juffermans