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Estimating resist parameters in optical lithograpgy using the extended Nijboer-Zernike theory

Journal article - P. Dirksen, J.J.M. Braat, AJEM Janssen

High-NA aberration retrieval with extended Nijboer-Zernike vector diffraction theory: Erratum

Journal article - S. van Haver, J.J.M. Braat, P. Dirksen, AJEM Janssen

Aberration retrieval for high-NA optical systems using the extended Nijboer-Zernike theory

Journal article - P. Dirksen, J.J.M. Braat, AJEM Janssen, A Leeuwenstein

Characterization of a novel mask imaging algorithm based on the Extended Nijboer-Zernike (ENZ) formalism.

Poster - S. van Haver, O.T.A. Janssen, AJEM Janssen, J.J.M. Braat, S.F. Pereira, P Evanschitzky

Extended Nijboer-Zernike (ENZ) based evaluation of amplitude and phase aberrations on scaled and annual pupils.

Conference paper - S. van Haver, AJEM Janssen, P. Dirksen, J.J.M. Braat

Image simulations of extended objects using an algorithm based on the Extended Nijboer Zernike (ENZ) formalism

Poster - S. van Haver, O.T.A. Janssen, AJEM Janssen, J.J.M. Braat, S.F. Pereira

Through-Focus Point-Spread Function Evaluation fro Lens Metrology using the extended Nijboer-Zernike Theory

Conference paper - J.J.M. Braat, P. Dirksen, AJEM Janssen

Extended Nijboer-Zernike representation of the field in the focal region of an aberrated high-aperture optical system

Journal article - J.J.M. Braat, P. Dirksen, AJEM Janssen, A.S. van de Nes

On the computation of the Nijboer-Zernike aberration intergrals at arbitrary defocus

Journal article - AJEM Janssen, J.J.M. Braat, P. Dirksen

Vectorial aerial-image computations of three-dimensional objects based on the extended Nijboer-Zernike theory

Journal article - S. van Haver, J.J.M. Braat, AJEM Janssen, O.T.A. Janssen, S.F. Pereira

High-NA aberration retrieval with the extended Nijboer-Zernike vector diffraction theory.

Journal article - S. van Haver, J.J.M. Braat, P. Dirksen, AJEM Janssen

Assessment of optical systems by means of point-spread functions.

Book chapter - J.J.M. Braat, S. van Haver, AJEM Janssen, P. Dirksen

Design of orthogonal and biorthogonal lapped transforms satisfying perception related constraints

Journal article - H. Bölcskei, R. Heusdens, R Theunis, AJEM Janssen

Strehl ratio and optimum focus of high-numerical-aperture beams.

Journal article - AJEM Janssen, S. van Haver, J.J.M. Braat, P. Dirksen

Abberation retrieval from the intensity points-spread function in the focal region using the extended

Journal article - C van der Avoort, J.J.M. Braat, P. Dirksen, AJEM Janssen

Aerial image based lens metrology for wafer steppers.

Journal article - P. Dirksen, J.J.M. Braat, AJEM Janssen, A Leeuwestein, T Matsuyama, T Noda

High-NA lens characterization by through-focus intensity measurement

Conference paper - S. van Haver, J.J.M. Braat, P. Dirksen, AJEM Janssen

Extended Nijboer-Zernike (ENZ) based mask imaging: efficient coupling of electromagnetic field solvers and the ENZ imaging algorithm

Journal article - O.T.A. Janssen, S. van Haver, AJEM Janssen, J.J.M. Braat, Paul Urbach, S.F. Pereira

Evaluation of scaled and annular pupils within the framework od the extended Nijboer-Zernike (ENZ) formalism.

Poster - S. van Haver, J.J.M. Braat, S.F. Pereira, AJEM Janssen

Aberration retrieval using the extended Nijboer-Zernike approach

Journal article - P. Dirksen, J.J.M. Braat, AJEM Janssen, C. Juffermans

AJEM Janssen

Authored