Vectorial Aerial-image computations of three-dimensional objects based on the Extended Nijboer-Zernike Theory

Vectorial aerial-image computations of three-dimensional objects based on the extended Nijboer-Zernike theory

General imaging of advanced 3D mask object based on the fully-vectorial extended Nijboer-Zernike (ENZ) theory.

Analytic expressions and approximations for the on-axis, aberration-free Rayleigh and Debye intergral in the case of focusing fields on a circular aperture.

Zernike representation and Strehl ratio op optical systems with variable numerical aperture.

Extended Nijboer-Zernike (ENZ) based mask imaging: efficient coupling of electromagnetic field solvers and the ENZ imaging algorithm

Characterization of a novel mask imaging algorithm based on the Extended Nijboer-Zernike (ENZ) formalism.

Assessment of optical systems by means of point-spread functions.

Evaluation of scaled and annular pupils within the framework od the extended Nijboer-Zernike (ENZ) formalism.

Image simulations of extended objects using an algorithm based on the Extended Nijboer Zernike (ENZ) formalism

High-NA aberration retrieval with extended Nijboer-Zernike vector diffraction theory: Erratum

Strehl ratio and optimum focus of high-numerical-aperture beams.

Extended Nijboer-Zernike (ENZ) based evaluation of amplitude and phase aberrations on scaled and annual pupils.

High-NA aberration retrieval with the extended Nijboer-Zernike vector diffraction theory.

High-NA lens characterization by through-focus intensity measurement

Aerial image based lens metrology for wafer steppers.

Estimating resist parameters in optical lithograpgy using the extended Nijboer-Zernike theory

Through-Focus Point-Spread Function Evaluation fro Lens Metrology using the extended Nijboer-Zernike Theory

Abberation retrieval from the intensity points-spread function in the focal region using the extended

Polarisation-aberration retrieval for high-NA systems using the extended Nijboer-Zernike diffraction theory.