Av

A.S. van de Nes

Authored

19 records found

In this paper we present an investigation of the main non-idealities and error sources in precision capacitive displacement sensors. The sources of errors are described quantitatively and a compensation technique is proposed. The linearity of a capacitive sensor with self-alignme ...

Contributed

1 records found

To meet the growing demand for high precision measurement equipment, sensors with sub-nanometer resolution are becoming readily available. Because of its high precision, traceability and ease of use, the interferometer stands out for high precision measurements. However, the lase ...