Polarisation-aberration retrieval for high-NA systems using the extended Nijboer-Zernike diffraction theory.
Poster
(2005)
Author(s)
J.J.M. Braat (TU Delft - ImPhys/Optics)
P. Dirksen (External organisation)
AJEM Janssen (External organisation)
A.S. van de Nes (TU Delft - ImPhys/Optics)
Research Group
ImPhys/Optics
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Publication Year
2005
Research Group
ImPhys/Optics
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