Aberration retrieval for high-NA optical systems using the extended Nijboer-Zernike theory

Journal Article (2005)
Author(s)

P. Dirksen (External organisation)

J.J.M. Braat (TU Delft - ImPhys/Optics)

AJEM Janssen (External organisation)

A Leeuwenstein (External organisation)

Research Group
ImPhys/Optics
More Info
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Publication Year
2005
Research Group
ImPhys/Optics
Volume number
5754
Pages (from-to)
262-274

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