High-NA lens characterization by through-focus intensity measurement
Conference Paper
(2006)
Author(s)
S van Haver (TU Delft - ImPhys/Optics)
J.J.M. Braat (TU Delft - ImPhys/Optics)
P. Dirksen (External organisation)
AJEM Janssen (External organisation)
Research Group
ImPhys/Optics
To reference this document use:
https://resolver.tudelft.nl/uuid:01e74a74-68b4-4f85-bca4-2d08482c9d41
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Publication Year
2006
Research Group
ImPhys/Optics
Pages (from-to)
56-57
ISBN (print)
3-00-019532-7
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