Influence of mask induced polarization effects on a pattern printability
Journal Article
(2005)
Author(s)
Y Aksenov (External organisation)
P. Dirksen (External organisation)
X Wei (TU Delft - ImPhys/Optics)
P Zandbergen (External organisation)
Research Group
ImPhys/Optics
To reference this document use:
https://resolver.tudelft.nl/uuid:89fd2b29-aaa3-4344-b94a-4c60b8efe6c8
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Publication Year
2005
Research Group
ImPhys/Optics
Volume number
5754
Pages (from-to)
576-586
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