Estimating resist parameters in optical lithograpgy using the extended Nijboer-Zernike theory
Journal Article
(2006)
Author(s)
P. Dirksen (External organisation)
Joseph Braat (TU Delft - ImPhys/Optics)
AJEM Janssen (External organisation)
Research Group
ImPhys/Optics
To reference this document use:
https://resolver.tudelft.nl/uuid:aa856795-57b8-4b71-82b1-7e8c3695b245
More Info
expand_more
expand_more
Publication Year
2006
Research Group
ImPhys/Optics
Issue number
1
Volume number
5
Pages (from-to)
013005-1-013005-11
No files available
Metadata only record. There are no files for this record.