Characteizatin of deposition rate and gap filling capability of a high density plasma deposition reactor
Journal Article
(1998)
Author(s)
DJ de Boer (External organisation)
GCAM Janssen (TU Delft - OLD Metals Processing, Microstructures and Properties)
S Radelaar (TU Delft - OLD Metals Processing, Microstructures and Properties)
Research Group
OLD Metals Processing, Microstructures and Properties
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https://resolver.tudelft.nl/uuid:9093eb85-473c-4942-b5aa-f9ad79def71b
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Publication Year
1998
Research Group
OLD Metals Processing, Microstructures and Properties
Volume number
38
Pages (from-to)
281-286
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