Integrated piezoresistive force and position detection sensors for micro-handling applications
Journal Article
(2013)
Author(s)
J Wei (TU Delft - Electronic Components, Technology and Materials)
M Porta (TU Delft - Micro and Nano Engineering)
M Tichem (TU Delft - Micro and Nano Engineering)
U. Staufer (TU Delft - Micro and Nano Engineering)
P.M. Sarro (TU Delft - Electronic Components, Technology and Materials)
Research Group
Electronic Components, Technology and Materials
DOI related publication
https://doi.org/10.1109/JMEMS.2013.2259142
To reference this document use:
https://resolver.tudelft.nl/uuid:909ced7c-3c61-4eb6-a737-bb815599dfcd
More Info
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Publication Year
2013
Language
English
Research Group
Electronic Components, Technology and Materials
Issue number
6
Volume number
22
Pages (from-to)
1310-1326
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