Integrated piezoresistive force and position detection sensors for micro-handling applications

Journal article (2013)

Authors

J. Wei Electronic Components, Technology and Materials - EEMCS
M Porta Micro and Nano Engineering - Mechanical, Maritime and Materials Engineering
M. Tichem Micro and Nano Engineering - Mechanical, Maritime and Materials Engineering
U. Staufer Micro and Nano Engineering - Mechanical, Maritime and Materials Engineering
Pasqualina M Sarro Electronic Components, Technology and Materials - EEMCS
Research Group
Electronic Components, Technology and Materials (EEMCS) (TU Delft)
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Published Date

2013

Language

English

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Faculty

Electrical Engineering, Mathematics and Computer Science

Department

Microelectronics

Research Group

Electronic Components, Technology and Materials