Mechanical characterization and cleaning of CVD single-layer h-BN resonators
S.J. Cartamil Bueno (TU Delft - QN/Steeneken Lab, Kavli institute of nanoscience Delft)
Matteo Cavalieri (Kavli institute of nanoscience Delft)
Ruizhi Wang (University of Cambridge)
S. Houri (Kavli institute of nanoscience Delft, TU Delft - QN/van der Zant Lab)
Stephan Hofmann (University of Cambridge)
H.S.J. van der Zant (Kavli institute of nanoscience Delft, TU Delft - QN/van der Zant Lab)
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Abstract
Hexagonal boron nitride is a 2D material whose single-layer allotrope has not been intensively studied despite being the substrate for graphene electronics. Its transparency and stronger interlayer adhesion with respect to graphene makes it difficult to work with, and few applications have been proposed. We have developed a transfer technique for this extra-adhesive material that does not require its visual localization, and fabricated mechanical resonators made out of chemical vapor-deposited single-layer hexagonal boron nitride. The suspended material was initially contaminated with polymer residues from the transfer, and the devices showed an unexpected tensioning when cooling them to 3 K. After cleaning in harsh environments with air at 450 °C and ozone, the temperature dependence changed with f0Q products reaching 2 × 1010 Hz at room temperature. This work paves the way to the realization of highly sensitive mechanical systems based on hexagonal boron nitride, which could be used as an alternative material to SiN for optomechanics experiments at room temperature.
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