Diffusion of single quantum well Si1-xGex/Si layers under vacancy supersaturation

Journal article (2001)

Authors

M Griglione External organisation
TJ Anderson External organisation
ME Law External organisation
KS Jones External organisation
A. van den Bogaard Electronic Components, Technology and Materials - EEMCS
M Puga-Lambers External organisation
Research Group
Electronic Components, Technology and Materials (EEMCS) (TU Delft)
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Published Date

2001

Language

Undefined/Unknown

Reuse Rights

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Faculty

Electrical Engineering, Mathematics and Computer Science

Department

Microelectronics

Research Group

Electronic Components, Technology and Materials