Structural and opto-electronic properties of a-Si:H/a-SiNx:H superlattices, in amorphous and polycrystalline thin-film silicon science and technology
Conference Paper
(2008)
Author(s)
SL Luxembourg (TU Delft - Electronic Components, Technology and Materials)
F. Tichelaar (QN/High Resolution Electron Microscopy)
P Kus (External organisation)
M. Zeman (TU Delft - Electronic Components, Technology and Materials)
Research Group
Electronic Components, Technology and Materials
To reference this document use:
https://resolver.tudelft.nl/uuid:9181b3d8-2d1b-4063-ae5b-a1c7d22b738e
More Info
expand_more
expand_more
Publication Year
2008
Research Group
Electronic Components, Technology and Materials
Pages (from-to)
1-6
No files available
Metadata only record. There are no files for this record.