Structural and opto-electronic properties of a-Si:H/a-SiNx:H superlattices, in amorphous and polycrystalline thin-film silicon science and technology

Conference paper (2008)

Authors

SL Luxembourg Electronic Components, Technology and Materials - EEMCS
P Kus External organisation
M. Zeman Electronic Components, Technology and Materials - EEMCS
Research Group
Electronic Components, Technology and Materials (EEMCS) (TU Delft)
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Published Date

2008

Language

Undefined/Unknown

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Faculty

Electrical Engineering, Mathematics and Computer Science

Department

Microelectronics

Research Group

Electronic Components, Technology and Materials