Electron beam induced deposited etch masks

Journal Article (2009)
Author(s)

C.T.H. Heerkens (TU Delft - ImPhys/Charged Particle Optics)

M.J. Kamerbeek (TU Delft - Electronic Components, Technology and Materials)

W.F. van Dorp (TU Delft - ImPhys/Charged Particle Optics)

Cornelis W. Hagen (TU Delft - ImPhys/Charged Particle Optics)

Jaap Hoekstra (TU Delft - Electronics)

Research Group
ImPhys/Charged Particle Optics
More Info
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Publication Year
2009
Research Group
ImPhys/Charged Particle Optics
Issue number
4-6
Volume number
86
Pages (from-to)
961-964

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