Electron beam induced deposited etch masks

Heerkens, C.T.H.; Kamerbeek, M.J.; van Dorp, W.F.; Hagen, C.W.; Hoekstra, J.

Electron beam induced deposited etch masks

Journal article (2009)

Authors

C.T.H. Heerkens ImPhys/Charged Particle Optics

M.J. Kamerbeek Electronic Components, Technology and Materials -

W.F. van Dorp ImPhys/Charged Particle Optics

C.W. Hagen ImPhys/Charged Particle Optics

J. Hoekstra Electronics -

Research Group

ImPhys/Charged Particle Optics

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Published Date

2009

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Research Group

ImPhys/Charged Particle Optics