M.J. Kamerbeek | TU Delft Repository

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M.J. Kamerbeek

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Conference paper (1)

Journal article (2)

3 records found

1

Pattern transfer into silicon using sub-10 nm masks made by electron beam induced deposition

Conference paper (2015) - M. Scotuzzi (author), M.J. Kamerbeek (author), A Goodyear (author), M Cooke (author), C.W. Hagen (author)

Pattern transfer into silicon using sub-10 nm masks made by electron beam-induced deposition

Journal article (2015) - M. Scotuzzi (author), M.J. Kamerbeek (author), A Goodyear (author), M Cooke (author), C.W. Hagen (author)

Electron beam induced deposited etch masks

Journal article (2009) - C.T.H. Heerkens (author), M.J. Kamerbeek (author), W.F. van Dorp (author), C.W. Hagen (author), J. Hoekstra (author)