M.J. Kamerbeek | TU Delft Repository

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M.J. Kamerbeek

Journal article (2)

2 records found

1

Pattern transfer into silicon using sub-10 nm masks made by electron beam-induced deposition

Journal article (2015) - Marijke Scotuzzi (author) , M.J. Kamerbeek (author) , A Goodyear (author) , M Cooke (author) , CW Hagen (author)

Electron beam induced deposited etch masks

Journal article (2009) - CTH Heerkens (author) , M.J. Kamerbeek (author) , W.F. van Dorp (author) , C. W. Hagen (author) , Jaap Hoekstra (author)