Shot noise in electron-beam lithography and line-width measurements
Journal Article
(2006)
Author(s)
Pieter Kruit (TU Delft - ImPhys/Charged Particle Optics)
S. Steenbrink (External organisation)
Research Group
ImPhys/Charged Particle Optics
To reference this document use:
https://resolver.tudelft.nl/uuid:94e9dd27-57bc-4705-84a8-138184d73eab
More Info
expand_more
expand_more
Publication Year
2006
Research Group
ImPhys/Charged Particle Optics
Issue number
1
Volume number
28
Pages (from-to)
20-26
No files available
Metadata only record. There are no files for this record.