Nanometer precision six degrees of freedom planar motion stage with ferrofluid bearings
Conference Paper
(2014)
Research Group
Mechatronic Systems Design
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https://resolver.tudelft.nl/uuid:9545db5b-511d-4fe1-ba79-7723723b7315
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Publication Year
2014
Language
English
Research Group
Mechatronic Systems Design
Pages (from-to)
47-50
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