Parameter retrieval of small particles in dark-field Fourier ptychography and a rectangle in real-space ptychography
Xukang Wei (TU Delft - ImPhys/Optics)
H. P. Urbach (TU Delft - ImPhys/Optics)
Peter Van Der Walle (TNO)
W. M.J. Coene (TU Delft - ImPhys/Optics, ASML)
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Abstract
We present a parameter retrieval method which incorporates prior knowledge about the object into ptychography. The proposed method is applied to two applications: (1) parameter retrieval of small particles from Fourier ptychographic dark field measurements; (2) parameter retrieval of a rectangular structure with real-space ptychography. The influence of Poisson noise is discussed in the second part of the paper. The Cramér Rao Lower Bound in both applications is computed and Monte Carlo analysis is used to verify the calculated lower bound. With the computation results we report the lower bound for various noise levels and analyze the correlation of particles in application 1. For application 2 the correlation of parameters of the rectangular structure is discussed.
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