Predictable Opto-Mechanical Design for a Critical Reflective Surface
R. Kleer (TU Delft - Mechanical Engineering)
L.A. Cacace – Mentor (TU Delft - Optical Technologies)
Jo W. Spronck – Graduation committee member (TU Delft - Mechatronic Systems Design)
Ruud Beerens – Coach (ASML)
Frank Verhouden – Coach (ASML)
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Abstract
As the world becomes more connected, smarter, and more eco-friendly, computer microchips represent both the limitation and the heart of the process. To keep up with this growth, ASML creates machines that areable to produce computer-chips that are increasingly powerful & energy efficient. State of the art machines are converting CO2 laser light into Extreme Ultra Violet (EUV) light that is crucial for the process. However, the conversion efficiency depends a lot on the beam quality of the CO2 laser light. This beam quality depends, among other things, on the optics (mirrors) and their associated surface deformations. Many examples exist in Opto-Mechanical oriented literature about mounting mirrors. However, many of them are tailored to the specific circumstances. In order to present and use existing knowledge, a literature study is conducted that summarises and elaborates on current technology. The purpose of this thesis is to present an existing Opto-Mechanical error in current design of a subsystem of the EUV machine, and thereby propose a new design, tailored to the requirements. The research follows the well known V-model, beginning with derivation of clear requirements leading to a verificationtable that analyse those specifications. This conceptual design has shown to have up to a 4X improvement in terms of astigmatism which mainly occurred due to the temperature variations during transport.