Anisotropic film growth during sputterdeposition of chromium
Report
(2003)
Author(s)
SY Grachev (TU Delft - OLD Virtual Materials and Mechanics)
J. Kamminga (TU Delft - OLD Virtual Materials and Mechanics)
Paul Alkemade (TU Delft - Old - sect Electronic Materials (NS/EM))
Guido Janssen (TU Delft - OLD Metals Processing, Microstructures and Properties)
Research Group
OLD Virtual Materials and Mechanics
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Publication Year
2003
Research Group
OLD Virtual Materials and Mechanics
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