Anisotropic film growth during sputterdeposition of chromium

Report (2003)

Authors

SY Grachev OLD Virtual Materials and Mechanics
J. Kamminga OLD Virtual Materials and Mechanics
P.F.A. Alkemade Old - sect Electronic Materials (NS/EM)
G.C.A.M. Janssen OLD Metals Processing, Microstructures and Properties
Research Group
OLD Virtual Materials and Mechanics
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Published Date

2003

Language

Undefined/Unknown

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Research Group

OLD Virtual Materials and Mechanics