Thermal CVD film-silicon on SiA1ON based ceramic substrates
Conference Paper
(1999)
Author(s)
AJMM Zutphen (TU Delft - Electronic Components, Technology and Materials)
A von Keitz (ECN, Petten)
M Zeman (TU Delft - Electronic Components, Technology and Materials)
JW Metselaar (TU Delft - Electronic Components, Technology and Materials)
Research Group
Electronic Components, Technology and Materials
To reference this document use:
https://resolver.tudelft.nl/uuid:9623f0cd-8e9a-4d0b-9bb7-9f85488d4eae
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Publication Year
1999
Research Group
Electronic Components, Technology and Materials
Pages (from-to)
625-629
ISBN (print)
90-37461-18-9
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