Agglomeration of amorphous silicon film with high energy density excimer laser irradiation
Journal Article
(2007)
Author(s)
M He (TU Delft - Electronic Components, Technology and Materials)
Ryoichi Ishihara (TU Delft - Electronic Components, Technology and Materials)
JW Metselaar (TU Delft - Electronic Components, Technology and Materials)
Kees Beenakker (TU Delft - Electronic Components, Technology and Materials)
Research Group
Electronic Components, Technology and Materials
To reference this document use:
https://resolver.tudelft.nl/uuid:97265995-4fe5-4ede-b7e9-7f5f205b3ccd
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Publication Year
2007
Research Group
Electronic Components, Technology and Materials
Volume number
515
Pages (from-to)
2872-2878
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