Thermal budget considerations for excimer laser annealing of implanted dopants
Conference Paper
(2009)
Author(s)
V Gonda (TU Delft - Electronic Components, Technology and Materials)
J Venturini (External organisation)
C Sabatier (External organisation)
J. van der Cingel (TU Delft - Electronic Components, Technology and Materials)
L. K. Nanver (TU Delft - Electronic Components, Technology and Materials)
Research Group
Electronic Components, Technology and Materials
To reference this document use:
https://resolver.tudelft.nl/uuid:97528669-21f3-4351-933e-d858041dd479
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Publication Year
2009
Research Group
Electronic Components, Technology and Materials
Pages (from-to)
1-4
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