Two types of silicon biomimetics MEMS gyroscopes

Abstract (2010)

Authors

w Cui External organisation
G. Pandraud Electronic Components, Technology and Materials - EEMCS
DHB Wicaksono Electronic Instrumentation - EEMCS
Y. Chen Electronic Instrumentation - EEMCS
V. Rajaraman Electronic Instrumentation - EEMCS
P.J. French Electronic Instrumentation - EEMCS
Research Group
Electronic Components, Technology and Materials (EEMCS) (TU Delft)
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Published Date

2010

Language

English

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Faculty

Electrical Engineering, Mathematics and Computer Science

Department

Microelectronics

Research Group

Electronic Components, Technology and Materials