Arrays of high reflectivity SiN photonic crystal membranes for cavity optomechanics

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Arrays of high reflectivity SiN photonic crystal membranes for cavity optomechanics

Conference Paper (2018)

Author(s)

J. P. Moura (Kavli institute of nanoscience Delft, TU Delft - QN/Groeblacher Lab)

Claus Gartner (Kavli institute of nanoscience Delft, University of Vienna, TU Delft - QN/Groeblacher Lab)

W.R. Haaxman (Student TU Delft, Kavli institute of nanoscience Delft)

R.A. Norte (Kavli institute of nanoscience Delft, TU Delft - Dynamics of Micro and Nano Systems)

S. Groeblacher (Kavli institute of nanoscience Delft, TU Delft - QN/Groeblacher Lab)

Research Group

QN/Groeblacher Lab

DOI related publication

https://doi.org/10.1364/FIO.2018.FW1E.3

To reference this document use:

https://resolver.tudelft.nl/uuid:988aa5cf-6dc4-479e-a5d0-6b29de1ca753

More Info

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Publication Year

2018

Language

English

Research Group

QN/Groeblacher Lab

Volume number

Part F114-FIO 2018

ISBN (electronic)

978-1-557528-20-9

Abstract

We fabricate photonic crystal SiN membranes with reflectivity > 99.9% at 1550 nm. These form a platform for studying arrays of mechanical oscillators inside optical cavities, which can potentially reach strong single-photon optomechanical coupling.

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