Arrays of high reflectivity SiN photonic crystal membranes for cavity optomechanics

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Arrays of high reflectivity SiN photonic crystal membranes for cavity optomechanics

Conference Paper (2018)

Author(s)

João P. Moura (Kavli institute of nanoscience Delft, TU Delft - Applied Sciences)

Claus Gärtner (Kavli institute of nanoscience Delft, University of Vienna, TU Delft - Applied Sciences)

Wouter Haaxman (Student TU Delft, Kavli institute of nanoscience Delft)

Richard A. Norte (Kavli institute of nanoscience Delft, TU Delft - Mechanical Engineering)

Simon Gröblacher (Kavli institute of nanoscience Delft, TU Delft - Applied Sciences)

Research Group

QN/Groeblacher Lab

DOI related publication

https://doi.org/10.1364/FIO.2018.FW1E.3 Final published version

To reference this document use

https://resolver.tudelft.nl/uuid:988aa5cf-6dc4-479e-a5d0-6b29de1ca753

More Info

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Publication Year

2018

Language

English

Research Group

QN/Groeblacher Lab

Volume number

Part F114-FIO 2018

Article number

paper FW1E.3

ISBN (electronic)

978-1-557528-20-9

Event

Frontiers in Optics, FIO 2018 (2018-09-16 - 2018-09-20), Washington, DC, United States

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Abstract

We fabricate photonic crystal SiN membranes with reflectivity > 99.9% at 1550 nm. These form a platform for studying arrays of mechanical oscillators inside optical cavities, which can potentially reach strong single-photon optomechanical coupling.