Amorphous silicon carbide (a-SiC) has emerged as a compelling candidate for applications in integrated photonics, known for its high refractive index, high optical quality, high thermo-optic coefficient, and strong third-order nonlinearities. Furthermore, a-SiC can be easily deposited via CMOS-compatible chemical vapor deposition (CVD) techniques, allowing for precise thickness control and adjustable material properties on arbitrary substrates. Silicon nitride (SiN) is an industrially well-established and well-matured platform, which exhibits ultra-low propagation loss, but it is suboptimal for high-density reconfigurable photonics due to the large minimum bending radius and constrained tunability. In this work, we monolithically combine the a-SiC with SiN photonics, leveraging the merits of both platforms, and achieve the a-SiC/SiN heterogeneous integration with an on-chip interconnection loss of ( 0.28^+0.44_−0.28) dB and integration density increment exceeding 4444-fold. By implementing active devices on the a-SiC, we achieve 27 times higher thermo-optic tuning efficiency, with respect to the SiN photonic platform. In addition, the a-SiC/SiN platform gives the flexibility to choose the optimal fiber-to-chip coupling strategy depending on the interfacing platform, with efficient side-coupling on SiN and grating-coupling on the a-SiC platform. The proposed a-SiC/SiN photonic platform can foster versatile applications in programmable and quantum photonics, nonlinear optics, and beyond.

Integrated photonic circuits have transformed data communication, biosensing, and light detection and ranging and hold wide-ranging potential for optical computing, optical imaging, and signal processing. These applications often require tunable and reconfigurable photonic components, most commonly accomplished through the thermo-optic effect. However, the resulting tuning window is limited for standard optical materials, such as silicon dioxide and silicon nitride. Most importantly, bidirectional thermal tuning on a single platform has not been realized. For the first time, we show that by tuning and optimizing the deposition conditions in inductively coupled plasma chemical vapor deposition (ICPCVD) of silicon dioxide, this material can be used to deterministically tune the thermo-optic properties of optical devices without introducing significant losses. We demonstrate that we can deterministically integrate positive and negative wavelength shifts on a single chip, validated on amorphous silicon carbide (a-SiC), silicon nitride (SiN), and silicon-on-insulator (SOI) platforms. This enables the fabrication of a novel tunable coupled ring optical waveguide (CROW) requiring only a single heater. In addition, we observe up to a 10-fold improvement of the thermo-optic tunability and demonstrate athermal ring resonators with shifts as low as 1.5 pm/°C. The low-temperature deposition of our silicon dioxide cladding can be combined with lift-off to isolate the optical devices, resulting in a decrease in thermal crosstalk by at least 2 orders of magnitude. Our method paves the way for novel photonic architectures incorporating bidirectional thermo-optic tunability.

In the past decade, lithium niobate (LiNbO₃ or LN) photonics, thanks to its heat-free and fast electro-optical modulation, second-order non-linearities, and low-loss, has been extensively investigated. Despite numerous demonstrations of high-performance LN photonics, processing lithium niobate remains challenging and suffers from incompatibilities with standard complementary metal-oxide-semiconductor (CMOS) fabrication lines, limiting its scalability. Silicon carbide (SiC) is an emerging material platform with a high refractive index, a large non-linear Kerr coefficient, and a promising candidate for heterogeneous integration with LN photonics. Current approaches of SiC/LN integration require transfer-bonding techniques, which are time-consuming, expensive, and lack precision in layer thickness. Here, we show that amorphous silicon carbide (a-SiC), deposited using inductively coupled plasma enhanced chemical vapor deposition at low temperatures (<165 °C), can be conveniently integrated with LiNbO₃ and processed to form high-performance photonics. Most importantly, the fabrication only involves a standard, silicon-compatible, reactive ion etching step and leaves the LiNbO₃ intact, hence its compatibility with standard foundry processes. As a proof-of-principle, we fabricated waveguides and ring resonators on the developed a-SiC/LN platform and achieved intrinsic quality factors higher than 1.06 × 10⁵ and a resonance electro-optic tunability of 3.4 pm/V with a 3 mm tuning length. We showcase the possibility of dense integration by fabricating and testing ring resonators with a 40 μm radius without a noticeable loss penalty. Our platform offers a CMOS-compatible and scalable approach for the implementation of future fast electro-optic modulators and reconfigurable photonic circuits, as well as nonlinear processes that can benefit from involving both second- and third-order nonlinearities.

Optomechanical systems using a membrane-in-the-middle configuration can exhibit a long-range type of interaction similar to how atoms show collective motion in an optical potential. Photons bounce back and forth inside a high-finesse Fabry-Pérot cavity and mediate the interaction between multiple membranes over a significant distance compared to the wavelength. Recently, it has been demonstrated that off-resonant coupling between light and the intermembrane cavity can lead to coherent mechanical noise cancellation. On-resonance coupling of light with both the Fabry-Pérot and intermembrane cavities, predicted to enhance the single-photon optomechanical coupling, have to date not been experimentally demonstrated, however. In our experiment, a double-membrane system inside a Fabry-Pérot cavity resonantly enhances the cavity field, resulting in a stronger optomechanical coupling strength from the increased radiation pressure. The resonance condition is first identified by analyzing the slope of the dispersion relation. Then, the optomechanical coupling is determined at various chip positions over one wavelength range. The optimum coupling conditions are obtained and enhancement is demonstrated for double-membrane arrays with three different reflectivites, reaching nearly fourfold enhancement for the collective motion of R=65% double membranes. The cavity losses at the optimum coupling are also characterized and the potential of reaching the single-photon strong coupling regime is discussed.

Microwave-optics entanglement plays a crucial role in building hybrid quantum networks with quantum nodes working in the microwave and optical frequency bands. However, there are limited efficient ways to produce such entanglement due to the large frequency mismatch between the two regimes. Here, a new mechanism is presented to prepare microwave-optics entanglement based on a hybrid system of two coupled opto- and magnomechanical microspheres, i.e., an yttrium-iron-garnet (YIG) sphere and a silica sphere. The YIG sphere holds a magnon mode and a vibration mode induced by magnetostriction, while the silica sphere supports an optical whispering-gallery mode and a mechanical mode coupled via an optomechanical interaction. The two mechanical modes are close in frequency and directly coupled via physical contact of the two microspheres. It is shown that by simultaneously activating the magnomechanical (optomechanical) Stokes (anti-Stokes) scattering, stationary entanglement can be established between the magnon and optical modes via mechanics-mechanics coupling. This leads to stationary microwave-optics entanglement by further coupling the YIG sphere to a microwave cavity and utilizing the magnon-microwave state swapping. The protocol is within reach of current technology and may become a promising new approach for preparing microwave-optics entanglement, which finds unique applications in hybrid quantum networks and quantum information processing with hybrid quantum systems.

A tunable magnetic field at low temperatures is essential for numerous applications, including spintronics, magnetic resonance imaging, and condensed matter physics. While commercial superconducting vector magnets are available, they are complex, expensive, and often not adaptable to specific experimental needs. As a result, simple in-house designs are often being used in research environments. However, no comprehensive step-by-step guide for their construction currently exists. In this work, we provide a detailed manual for designing and building a cryogenically compatible three-axis vector magnet. The system is tested at the mixing chamber of a dilution refrigerator at temperatures ranging from 15 mK to 4 K, with no significant increase in base temperature. Safety measures are implemented to mitigate heating from quenching. The coils are successfully driven with DC currents as high as 3 A, generating magnetic fields of up to 2.5 T in the bobbin’s bore and 0.4 T at the sample position. Magnetic field measurements using Hall sensors demonstrate good agreement with the predictions of the designed performance.

Superfluid helium is a prototypical quantum liquid. As such, it has been a prominent platform for the study of quantum many body physics. More recently, the outstanding mechanical and optical properties of superfluid helium, such as low mechanical dissipation and low optical absorption, have positioned superfluid helium as a promising material platform in applications ranging from dark matter and gravitational wave detection to quantum computation. However, experiments with superfluid helium incur a high barrier to entry, as they require the incorporation of complex optical and electrical setups within a hermetically sealed cryogenic chamber to confine the superfluid. Here, we report on the design and construction of a helium chamber setup for operation inside a dilution refrigerator at millikelvin temperatures, featuring electrical and optical fiber access. By incorporating an automated gas handling system, we can precisely control the amount of helium gas inserted into the chamber, rendering our setup particularly promising for experiments with superfluid helium thin films, such as superfluid thin film optomechanics. Using silicon nanophotonic resonators, we demonstrate precise control and in situ tuning of the thickness of a superfluid helium film on the sub-nanometer level. By making use of the exceptional tunability of the superfluid film thickness, we demonstrate optomechanically induced phonon lasing of phononic crystal cavity third sound modes in the superfluid film and show that the lasing threshold crucially depends on the film thickness. The large internal volume of our chamber (V_chamber ≈ 1 l) is adaptable for the integration of various optical and electrical measurement and control techniques. Therefore, our setup provides a versatile platform for a variety of experiments in fundamental and applied superfluid helium research.

High-frequency phonons hold great promise as carriers of quantum information on chip and as quantum memories. Because of their coherent interaction with several systems, their compact mode volume, and slow group velocity, multiple experiments have recently demonstrated coherent transport of information on chip using phonon modes, interconnecting distinct quantum devices. Strongly confined phonons in waveguidelike geometries are particularly interesting because of their long lifetime. However, spectral diffusion has been observed to substantially limit their coherence times [S. M. Meenehan et al., Silicon optomechanical crystal resonator at millikelvin temperatures, Phys. Rev. A 90, 011803(R) (2014), A. Wallucks et al., A quantum memory at telecom wavelengths, Nat. Phys. 16, 772 (2020), and G. S. MacCabe et al., Nano-acoustic resonator with ultralong phonon lifetime, Science 370, 840 (2020)]. Coupling to two-level systems is suspected to be a major contributor to the diffusion; however, to date, the origin and underlying mechanisms are still not fully understood. Here, we perform a time-domain study on two adjacent mechanical modes (separated by around 5 MHz) and show that the frequency positions of the two modes are not correlated in time, in agreement with our theoretical model and Monte Carlo simulations. This result is an important step in fully understanding the microscopic mechanisms of dephasing in mechanical quantum buses and memories.

In recent years, nanomechanical oscillators in thin films of superfluid helium have attracted attention in the field of optomechanics due to their exceptionally low mechanical dissipation and optical scattering. Mechanical excitations in superfluid thin films - so-called third sound waves - can interact with the optical mode of an optical microresonator by modulation of its effective refractive index enabling optomechanical coupling. Strong confinement of third sound modes enhances their intrinsic mechanical nonlinearity paving the way for strong phonon-phonon interactions with applications in quantum optomechanics. Here, we realize a phononic crystal cavity confining third sound modes in a superfluid helium film to length scales close to the third sound wavelength. A few-nanometer-thick superfluid film is self-assembled on top of a silicon nanobeam optical resonator. The periodic patterning of the silicon material creates a periodic modulation of the superfluid film leading to the formation of a phononic band gap. By engineering the geometry of the silicon nanobeam, the phononic band gap allows the confinement of a localized phononic mode.

We present our optimized diamond fabrication process based on quasi-isotropic crystal-plane-dependent reactive-ion-etching at low and high temperature plasma regime. We demonstrate successful integration of SnV centers in diamond waveguides showing quantum non-linear effects. We report on our latest results on all-diamond photonic crystal cavities.

Highly ambitious initiatives aspire to propel a miniature spacecraft to a neighboring star within a human generation, leveraging the radiation pressure of lasers for propulsion. One major challenge for this enormous feat is to build a meter-scale, ultralow mass lightsail with broadband reflectivity. In this work, we present the design and fabrication of a lightsail composed of two distinct dielectric layers with photonic crystal/metasurface structure covering a 4” wafer. We achieved broadband reflection of >70% spanning over the full Doppler-shifted laser wavelength range during spacecraft acceleration with a low total mass in the range of a few grams when scaled up to meter size. Furthermore, we find new paths to reliably fabricate these subwavelength structures over macroscopic areas and then systematically characterize their optical performance, confirming their suitability for future lightsail applications. Our innovative device and precise nanofabrication approaches represent a significant leap toward interstellar exploration.

Mechanical resonators that possess coupled modes with harmonic frequency relations have recently sparked interest due to their suitability for controllable energy transfer and non-Hermitian dynamics. Here we show coupling between high-𝑄-factor (greater than 104) resonances with a nearly 1:1 frequency relation in spatially symmetric microresonators. We develop and demonstrate a method to analyze their dynamical behavior based on the simultaneous and resonant detection of both spectral peaks, and validate this with experimental results. The frequency difference between the peaks modulates their ringdown, and creates a beat pattern in the linear decay. This method applies to both the externally driven regime and the Brownian-motion (thermal) regime, and allows characterization of both linear and nonlinear parameters. The mechanism behind this method renders it broadly applicable to both optical and electrical readout, as well as to different mechanical systems. This will aid studies using near-degenerate mechanical modes, for example, optomechanical energy transfer, synchronization, and gyroscopic sensors.

Lithium niobate (LNO) is a well established material for surface acoustic wave (SAW) devices including resonators, delay lines and filters. Recently, multi-layer substrates based on LNO thin films have become commercially available. Here, we present a systematic low-temperature study of the performance of SAW devices fabricated on LNO-on-insulator and LNO-on-Silicon substrates and compare them to bulk LNO devices. Our study aims at assessing the performance of these substrates for quantum acoustics, i.e. the integration with superconducting circuits operating in the quantum regime. To this end, we design SAW resonators with a target frequency of 5 GHz and perform experiments at millikelvin temperatures and microwave power levels corresponding to single photons or phonons. The devices are investigated regarding their internal quality factors as a function of the excitation power and temperature, which allows us to characterize and quantify losses and identify the dominating loss mechanism. For the measured devices, fitting the experimental data shows that the quality factors are limited by the coupling of the resonator to a bath of two-level-systems. Our results suggest that SAW devices on thin film LNO on silicon have comparable performance to devices on bulk LNO and are viable for use in SAW-based quantum acoustic devices.

We demonstrate dissipative optomechanical transduction and backaction in coupled nanobeams. Compared to previous demonstrations, our system corresponds to a hundredfold increase in mechanical frequency and displays a record-high dissipative optomechanical coupling.

Single quantum emitters embedded in solid-state hosts are an ideal platform for realizing quantum information processors and quantum network nodes. Among the currently investigated candidates, Er3+ ions are particularly appealing due to their 1.5 μm optical transition in the telecom band as well as their long spin coherence times. However, the long lifetimes of the excited state - generally in excess of 1 ms - along with the inhomogeneous broadening of the optical transition result in significant challenges. Photon emission rates are prohibitively small, and different emitters generally create photons with distinct spectra, thereby preventing multiphoton interference - a requirement for building large-scale, multinode quantum networks. Here we solve this challenge by demonstrating for the first time linear Stark tuning of the emission frequency of a single Er3+ ion. Our ions are embedded in a lithium niobate crystal and couple evanescently to a silicon nanophotonic crystal cavity that provides a strong increase of the measured decay rate. By applying an electric field along the crystal c axis, we achieve a Stark tuning greater than the ion's linewidth without changing the single-photon emission statistics of the ion. These results are a key step towards rare earth ion-based quantum networks.

As a two-dimensional planar material with low depth profile, a metasurface can generate non-classical phase distributions for the transmitted and reflected electromagnetic waves at its interface. Thus, it offers more flexibility to control the wave front. A traditional metasurface design process mainly adopts the forward prediction algorithm, such as Finite Difference Time Domain, combined with manual parameter optimization. However, such methods are time-consuming, and it is difficult to keep the practical meta-atom spectrum being consistent with the ideal one. In addition, since the periodic boundary condition is used in the meta-atom design process, while the aperiodic condition is used in the array simulation, the coupling between neighboring meta-atoms leads to inevitable inaccuracy. In this review, representative intelligent methods for metasurface design are introduced and discussed, including machine learning, physics-information neural network, and topology optimization method. We elaborate on the principle of each approach, analyze their advantages and limitations, and discuss their potential applications. We also summarize recent advances in enabled metasurfaces for quantum optics applications. In short, this paper highlights a promising direction for intelligent metasurface designs and applications for future quantum optics research and serves as an up-to-date reference for researchers in the metasurface and metamaterial fields.

Magnetic imaging with nitrogen-vacancy (NV) spins in diamond is becoming an established tool for studying nanoscale physics in condensed matter systems. However, the optical access required for NV spin readout remains an important hurdle for operation in challenging environments such as millikelvin cryostats or biological systems. Here, we demonstrate a scanning-NV sensor consisting of a diamond nanobeam that is optically coupled to a tapered optical fiber. This nanobeam sensor combines a natural scanning-probe geometry with high-efficiency through-fiber optical excitation and readout of the NV spins. We demonstrate through-fiber optically interrogated electron spin resonance and proof-of-principle magnetometry operation by imaging spin waves in an yttrium-iron-garnet thin film. Our scanning-nanobeam sensor can be combined with nanophotonic structuring to control the light-matter interaction strength and has potential for applications that benefit from all-fiber sensor access, such as millikelvin systems.

Microwave-optics entanglement is a vital component for building hybrid quantum networks. Here, a new mechanism for preparing stationary entanglement between microwave and optical cavity fields in a cavity optomagnomechanical system is proposed. It consists of a magnon mode in a ferrimagnetic crystal that couples directly to a microwave cavity mode via the magnetic dipole interaction and indirectly to an optical cavity through the deformation displacement of the crystal. The mechanical displacement is induced by the magnetostrictive force and coupled to the optical cavity via radiation pressure. Both the opto- and magnomechanical couplings are dispersive. Magnon–phonon entanglement is created via magnomechanical parametric down-conversion, which is further distributed to optical and microwave photons via simultaneous optomechanical beamsplitter interaction and electromagnonic state-swap interaction, yielding stationary microwave-optics entanglement. The microwave-optics entanglement is robust against thermal noise, which will find broad potential applications in quantum networks and quantum information processing with hybrid quantum systems.

The coherent transduction of information between microwave and optical domains is a fundamental building block for future quantum networks. A promising way to bridge these widely different frequencies is using high-frequency nanomechanical resonators interacting with low-loss optical modes. State-of-the-art optomechanical devices rely on purely dispersive interactions that are enhanced by a large photon population in the cavity. Additionally, one could use dissipative optomechanics, where photons can be scattered directly from a waveguide into a resonator hence increasing the degree of control of the acousto-optic interplay. Hitherto, such dissipative optomechanical interaction was only demonstrated at low mechanical frequencies, precluding prominent applications such as the quantum state transfer between photonic and phononic domains. Here, we show the first dissipative optomechanical system operating in the sideband-resolved regime, where the mechanical frequency is larger than the optical linewidth. Exploring this unprecedented regime, we demonstrate the impact of dissipative optomechanical coupling in reshaping both mechanical and optical spectra. Our figures represent a two-order-of-magnitude leap in the mechanical frequency and a tenfold increase in the dissipative optomechanical coupling rate compared to previous works. Further advances could enable the individual addressing of mechanical modes and help mitigate optical nonlinearities and absorption in optomechanical devices.

We present a homodyne detection scheme to reliably measure the dissipative coupling in optomechanical systems. Our method is validated on silicon devices yielding GK_e/GΩ= -0.007 ± 0.001.