J. Chang
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Amorphous silicon carbide (a-SiC) has emerged as a compelling candidate for applications in integrated photonics, known for its high refractive index, high optical quality, high thermo-optic coefficient, and strong third-order nonlinearities. Furthermore, a-SiC can be easily deposited via CMOS-compatible chemical vapor deposition (CVD) techniques, allowing for precise thickness control and adjustable material properties on arbitrary substrates. Silicon nitride (SiN) is an industrially well-established and well-matured platform, which exhibits ultra-low propagation loss, but it is suboptimal for high-density reconfigurable photonics due to the large minimum bending radius and constrained tunability. In this work, we monolithically combine the a-SiC with SiN photonics, leveraging the merits of both platforms, and achieve the a-SiC/SiN heterogeneous integration with an on-chip interconnection loss of ( 0.28+0.44−0.28) dB and integration density increment exceeding 4444-fold. By implementing active devices on the a-SiC, we achieve 27 times higher thermo-optic tuning efficiency, with respect to the SiN photonic platform. In addition, the a-SiC/SiN platform gives the flexibility to choose the optimal fiber-to-chip coupling strategy depending on the interfacing platform, with efficient side-coupling on SiN and grating-coupling on the a-SiC platform. The proposed a-SiC/SiN photonic platform can foster versatile applications in programmable and quantum photonics, nonlinear optics, and beyond.
From pixels to camera
Scaling superconducting nanowire single-photon detectors for imaging at the quantum-limit
Superconducting nanowire single-photon detectors (SNSPDs) have emerged as essential devices that push the boundaries of photon detection with unprecedented sensitivity, ultrahigh timing precision, and broad spectral response. Recent advancements in materials engineering, superconducting electronics integration, and cryogenic system design are enabling the evolution of SNSPDs from single-pixel detectors toward scalable arrays and large-format single-photon time tagging cameras. This perspective article surveys the rapidly evolving technological landscape underpinning this transition, focusing on innovative superconducting materials, advanced multiplexed read-out schemes, and emerging cryo-compatible electronics. We highlight how these developments are set to profoundly impact diverse applications, including quantum communication networks, deep-tissue biomedical imaging, single-molecule spectroscopy, remote sensing with unprecedented resolution, and the detection of elusive dark matter signals. By critically discussing both current challenges and promising solutions, we aim to articulate a clear, coherent vision for the next generation of SNSPD-based quantum imaging systems.
Broadband, High-Reflectivity Dielectric Mirrors at Wafer Scale
Combining Photonic Crystal and Metasurface Architectures for Advanced Lightsails
Highly ambitious initiatives aspire to propel a miniature spacecraft to a neighboring star within a human generation, leveraging the radiation pressure of lasers for propulsion. One major challenge for this enormous feat is to build a meter-scale, ultralow mass lightsail with broadband reflectivity. In this work, we present the design and fabrication of a lightsail composed of two distinct dielectric layers with photonic crystal/metasurface structure covering a 4” wafer. We achieved broadband reflection of >70% spanning over the full Doppler-shifted laser wavelength range during spacecraft acceleration with a low total mass in the range of a few grams when scaled up to meter size. Furthermore, we find new paths to reliably fabricate these subwavelength structures over macroscopic areas and then systematically characterize their optical performance, confirming their suitability for future lightsail applications. Our innovative device and precise nanofabrication approaches represent a significant leap toward interstellar exploration.
Since their first demonstration in 2001 [Gol’tsman et al., Appl. Phys. Lett. 79, 705-707 (2001)], superconducting-nanowire single-photon detectors (SNSPDs) have witnessed two decades of great developments. SNSPDs are the detector of choice in most modern quantum optics experiments and are slowly finding their way into other photon-starved fields of optics. Until now, however, in nearly all experiments, SNSPDs were used as “binary” detectors, meaning that they could only distinguish between 0 and > = 1 photons, and photon number information was lost. Recent research has demonstrated proof-of-principle photon-number resolution (PNR) SNSPDs counting 2-5 photons. The photon-number-resolving capability is highly demanded in various quantum-optics experiments, including Hong-Ou-Mandel interference, photonic quantum computing, quantum communication, and non-Gaussian quantum state preparation. In particular, PNR detectors at the wavelength range of 850-950 nm are of great interest due to the availability of high-quality semiconductor quantum dots (QDs) [Heindel et al., Adv. Opt. Photonics 15, 613-738 (2023)] and high-performance cesium-based quantum memories [Ma et al., J. Opt. 19, 043001 (2017)]. In this paper, we demonstrate NbTiN-based SNSPDs with >94% system detection efficiency, sub-11 ps timing jitter for one photon, and sub-7 ps for 2 photons. More importantly, our detectors resolve up to 7 photons using conventional cryogenic electric readout circuitry. Through theoretical analysis, we show that the PNR performance of demonstrated detectors can be further improved by enhancing the signal-to-noise ratio and bandwidth of our readout circuitry. Our results are promising for the future of optical quantum computing and quantum communication.
The terahertz frequency region of the electromagnetic spectrum is crucial for understanding the formation and evolution of galaxies and stars throughout the universe's history, as well as the process of planet formation. Detecting the unique spectral signatures of molecules and atoms requires terahertz spectrometers, which must be operated in space observatories due to water vapor absorption in the Earth's atmosphere. However, current terahertz spectrometers face challenges such as low resolution, limited bandwidth, large volume, and complexity. In this paper, the issues of size and weight are addressed by demonstrating a concept for a centimeter-sized, low-weight terahertz spectrometer using a metasurface. The design of the metasurface spectrometer is first discussed for the 1.85 to 2.4 THz range, followed by its fabrication. Next, an array of quantum cascade lasers operating at slightly different frequencies around 2.1 THz is utilized to characterize the spectrometer. Finally, a spectrum inversion method is applied to analyze the measured data, confirming a resolution R (λ/Δλ) of at least 273. This concept can be extended to other application areas, such as planetary observations and various wavelengths in the far-infrared (FIR) and near-infrared (NIR) ranges.
Achieving high degree of tunability in photonic devices has been a focal point in the field of integrated photonics for several decades, enabling a wide range of applications from telecommunication and biochemical sensing to fundamental quantum photonic experiments. We introduce a novel technique to engineer the thermal response of photonic devices resulting in large and deterministic wavelength shifts across various photonic platforms, such as amorphous Silicon Carbide (a-SiC), Silicon Nitride (SiN) and Silicon-On-Insulator (SOI). In this paper, we demonstrate bi-directional thermal tuning of photonic devices fabricated on a single chip. Our method can be used to design high-sensitivity photonic temperature sensors, low-power Mach-Zehnder interferometers and more complex photonics circuits.
Preparing a massive mechanical resonator in a state with quantum limited motional energy provides a promising platform for studying fundamental physics with macroscopic systems and allows to realize a variety of applications, including precise sensing. While several demonstrations of such ground-state cooled systems have been achieved, in particular in sideband-resolved cavity optomechanics, for many systems overcoming the heating from the thermal bath remains a major challenge. In contrast, optomechanical systems in the sideband-unresolved limit are much easier to realize due to the relaxed requirements on their optical properties, and the possibility to use a feedback control schemes to reduce the motional energy. The achievable thermal occupation is ultimately limited by the correlation between the measurement precision and the back-action from the measurement. Here, we demonstrate measurement-based feedback cooling on a fully integrated optomechanical device fabricated using a pick-and-place method, operating in the deep sideband-unresolved limit. With the large optomechanical interaction and a low thermal decoherence rate, we achieve a minimal average phonon occupation of 0.76 when pre-cooled with liquid helium and 3.5 with liquid nitrogen. Significant sideband asymmetry for both bath temperatures verifies the quantum character of the mechanical motion. Our method and device are ideally suited for sensing applications directly operating at the quantum limit, greatly simplifying the operation of an optomechanical system in this regime.
At the core of quantum photonic information processing and sensing, two major building pillars are single-photon emitters and single-photon detectors. In this review, we systematically summarize the working theory, material platform, fabrication process, and game-changing applications enabled by state-of-the-art quantum dots in nanowire emitters and superconducting nanowire single-photon detectors. Such nanowire-based quantum hardware offers promising properties for modern quantum optics experiments. We highlight several burgeoning quantum photonics applications using nanowires and discuss development trends of integrated quantum photonics. Also, we propose quantum information processing and sensing experiments for the quantum optics community, and future interdisciplinary applications.
Superconducting nanowire single-photon detectors (SNSPDs) show near unity efficiency, low dark count rate, and short recovery time. Combining these characteristics with temporal control of SNSPDs broadens their applications as in active de-latching for higher dynamic range counting or temporal filtering for pump-probe spectroscopy or LiDAR. To that end, we demonstrate active gating of an SNSPD with a minimum off-to-on rise time of 2.4 ns and a total gate length of 5.0 ns. We show how the rise time depends on the inductance of the detector in combination with the control electronics. The gate window is demonstrated to be fully and freely, electrically tunable up to 500 ns at a repetition rate of 1.0 MHz, as well as ungated, free-running operation. Control electronics to generate the gating are mounted on the 2.3 K stage of a closed-cycle sorption cryostat, while the detector is operated on the cold stage at 0.8 K. We show that the efficiency and timing jitter of the detector is not altered during the on-time of the gating window. We exploit gated operation to demonstrate a method to increase in the photon counting dynamic range by a factor 11.2, as well as temporal filtering of a strong pump in an emulated pump-probe experiment.
Integrated photonic platforms have proliferated in recent years, each demonstrating its unique strengths and shortcomings. Given the processing incompatibilities of different platforms, a formidable challenge in the field of integrated photonics still remains for combining the strengths of different optical materials in one hybrid integrated platform. Silicon carbide is a material of great interest because of its high refractive index, strong second- and third-order nonlinearities, and broad transparency window in the visible and near-infrared range. However, integrating silicon carbide (SiC) has been difficult, and current approaches rely on transfer bonding techniques that are time-consuming, expensive, and lacking precision in layer thickness. Here, we demonstrate high-index amorphous silicon carbide (a-SiC) films deposited at 150 °C and verify the high performance of the platform by fabricating standard photonic waveguides and ring resonators. The intrinsic quality factors of single-mode ring resonators were in the range of Qint = (4.7-5.7) × 105 corresponding to optical losses between 0.78 and 1.06 dB/cm. We then demonstrate the potential of this platform for future heterogeneous integration with ultralow-loss thin SiN and LiNbO3 platforms.
As a two-dimensional planar material with low depth profile, a metasurface can generate non-classical phase distributions for the transmitted and reflected electromagnetic waves at its interface. Thus, it offers more flexibility to control the wave front. A traditional metasurface design process mainly adopts the forward prediction algorithm, such as Finite Difference Time Domain, combined with manual parameter optimization. However, such methods are time-consuming, and it is difficult to keep the practical meta-atom spectrum being consistent with the ideal one. In addition, since the periodic boundary condition is used in the meta-atom design process, while the aperiodic condition is used in the array simulation, the coupling between neighboring meta-atoms leads to inevitable inaccuracy. In this review, representative intelligent methods for metasurface design are introduced and discussed, including machine learning, physics-information neural network, and topology optimization method. We elaborate on the principle of each approach, analyze their advantages and limitations, and discuss their potential applications. We also summarize recent advances in enabled metasurfaces for quantum optics applications. In short, this paper highlights a promising direction for intelligent metasurface designs and applications for future quantum optics research and serves as an up-to-date reference for researchers in the metasurface and metamaterial fields.
Shortly after their inception, superconducting nanowire single-photon detectors (SNSPDs) became the leading quantum light detection technology. With the capability of detecting single-photons with near-unity efficiency, high time resolution, low dark count rate, and fast recovery time, SNSPDs outperform conventional single-photon detection techniques. However, detecting lower energy single photons (<0.8 eV) with high efficiency and low timing jitter has remained a challenge. To achieve unity internal efficiency at mid-infrared wavelengths, previous works used amorphous superconducting materials with low energy gaps at the expense of reduced time resolution (close to a nanosecond), and by operating them in complex milliKelvin (mK) dilution refrigerators. In this work, we provide an alternative approach with SNSPDs fabricated from 5 to 9.5 nm thick NbTiN superconducting films and devices operated in conventional Gifford-McMahon cryocoolers. By optimizing the superconducting film deposition process, film thickness, and nanowire design, our fiber-coupled devices achieved >70% system detection efficiency (SDE) at 2 μm and sub-15 ps timing jitter. Furthermore, detectors from the same batch demonstrated unity internal detection efficiency at 3 μm and 80% internal efficiency at 4 μm, paving the road for an efficient mid-infrared single-photon detection technology with unparalleled time resolution and without mK cooling requirements. We also systematically studied the dark count rates (DCRs) of our detectors coupled to different types of mid-infrared optical fibers and blackbody radiation filters. This offers insight into the trade-off between bandwidth and DCRs for mid-infrared SNSPDs. To conclude, this paper significantly extends the working wavelength range for SNSPDs made from polycrystalline NbTiN to 1.5-4 μm, and we expect quantum optics experiments and applications in the mid-infrared range to benefit from this far-reaching technology.
Ultra-high system detection efficiency (SDE) s uperconducting nanowire single-photon detectors are demonstrated for a broad range of wavelengths, from UV to mid-infrared, opening novel possibilities in the fields of quantum photonics, neuroimaging and astronomy.
3D Cf/SiC–Al composites were achieved through the pressure infiltration of liquid Al–Si alloy into porous 3D Cf/SiC preform, which was produced by different cycles of precursor infiltration and pyrolysis. The effect of silicon carbide volume fraction on the microstructure, anisotropic mechanical response, and thermophysical characteristics of the 3D Cf/SiC–Al composites was investigated. The results demonstrated that the initial microstructure of 3D Cf/SiC can be retained, and the obtained Cf/SiC–Al composites presented remarkable anisotropy characteristics. As the silicon carbide ceramics content increased from 12.5 vol% to 41.8 vol%, the thermal conductivity and thermal expansion coefficient of 3D Cf/SiC–Al composites decreased, whereas the bending strength initially increased and then decreased in the Z-direction. The bending strength perpendicular (Z) to the carbon cloth layer of 3D Cf/SiC–Al composites was higher than that of parallel (X–Y) to the carbon cloth layer. However, a significant anisotropy in the thermal conductivity values was the opposite. The 3D Cf/SiC–Al composite with 1ow ceramic content (17 vol%) had a higher thermal conductivity in the X–Y direction (64 W m−1 K−1) than in the Z-direction (34 W m−1 K−1). The thermal expansion coefficient of all the 3D Cf/SiC–Al composites along the X–Y direction also decreased initially and then increased in the range of 100–450 °C, which presents low expansion characteristics.
Single photon detectors are indispensable tools in optics, from fundamental measurements to quantum information processing. The ability of superconducting nanowire single photon detectors (SNSPDs) to detect single photons with unprecedented efficiency, short dead time, and high time resolution over a large frequency range enabled major advances in quantum optics. However, combining near-unity system detection efficiency (SDE) with high timing performance remains an outstanding challenge. In this work, we fabricated novel SNSPDs on membranes with 99.5-2.07+0.5% SDE at 1350 nm with 32 ps timing jitter (using a room-temperature amplifier), and other detectors in the same batch showed 94%-98% SDE at 1260-1625 nm with 15-26 ps timing jitter (using cryogenic amplifiers). The SiO2/Au membrane enables broadband absorption in small SNSPDs, offering high detection efficiency in combination with high timing performance. With low-noise cryogenic amplifiers operated in the same cryostat, our efficient detectors reach a timing jitter in the range of 15-26 ps. We discuss the prime challenges in optical design, device fabrication, and accurate and reliable detection efficiency measurements to achieve high performance single photon detection. As a result, the fast developing fields of quantum information science, quantum metrology, infrared imaging, and quantum networks will greatly benefit from this far-reaching quantum detection technology.
We have demonstrated a low noise superconducting MgB2 hot electron bolometer (HEB) mixer working at the frequency of 5.3 terahertz (THz) with 20 K operation temperature. The bolometer consists of a 7 nm thick MgB2 submicrometer bridge contacted with a spiral antenna to couple THz radiation through a high resistive Si lens, and it has a superconducting critical temperature of 38 K. By using hot/cold blackbody loads and a Mylar beam splitter all in vacuum and applying a 5.25 THz far-infrared gas laser as a local oscillator, we measured a minimal double sideband receiver noise temperature of 3960 K at the LO power of 9.5 μW. This can be further reduced to 2920 K if a Si lens with an antireflection coating optimized at this frequency and a 3 μm beam splitter are used. The measured intermediate frequency (IF) noise bandwidth is 9.5 GHz. The low noise, wide IF bandwidth mixers, which can be operated in a compact, low dissipation Stirling cooler, are more suitable for space applications than the existing HEB mixers. Furthermore, we likely observed a signature of the double-gap in MgB2 by comparing current-voltage curves pumped at 5.3 and 1.6 THz.
Superconducting nanowire single-photon detectors
A perspective on evolution, state-of-the-art, future developments, and applications
Two decades after their demonstration, superconducting nanowire single-photon detectors (SNSPDs) have become indispensable tools for quantum photonics as well as for many other photon-starved applications. This invention has not only led to a burgeoning academic field with a wide range of applications but also triggered industrial efforts. Current state-of-the-art SNSPDs combine near-unity detection efficiency over a wide spectral range, low dark counts, short dead times, and picosecond time resolution. The present perspective discusses important milestones and progress of SNSPDs research, emerging applications, and future challenges and gives an outlook on technological developments required to bring SNSPDs to the next level: a photon-counting, fast time-tagging imaging, and multi-pixel technology that is also compatible with quantum photonic integrated circuits.