Mechanical reliability of silicon wafers with through-wafer vias for wafer-level packaging

Conference Paper (2002)
Author(s)

A Poliakov (TU Delft - Old - EWI Ch. Integrated Sensing Devices)

M Bartek (TU Delft - Old - EWI Ch. Integrated Sensing Devices)

JN Burghartz (TU Delft - Old - EWI Ch. Integrated Sensing Devices)

Research Group
Old - EWI Ch. Integrated Sensing Devices
More Info
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Publication Year
2002
Research Group
Old - EWI Ch. Integrated Sensing Devices
Bibliographical Note
CD-ROM
Pages (from-to)
1-5
Publisher
Elsevier
ISBN (print)
0-08-044181-5
Event
ESREF 2002, Rimini, Italy (2002-10-07 - 2002-10-11), New York
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