Ultrasound Imaging with Pre-charged Collapse-Mode CMUTs

Conference paper (2023)

Authors

M. Saccher Electronic Components, Technology and Materials - EEMCS
R. Dekker Philips, Electronic Components, Technology and Materials - EEMCS
Research Group
Electronic Components, Technology and Materials (EEMCS) (TU Delft)
Copyright: © 2023 S. Kawasaki, M. Saccher, Willem-Jan de Wijs, Jeroen van den Brand, R. Dekker
DOI
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https://doi.org/10.1109/IUS51837.2023.10307216
CMUT Pre-charged CMUT Wearable ultrasound
More Info
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Published Date

2023

Language

English

Reuse Rights

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Faculty

Electrical Engineering, Mathematics and Computer Science

Department

Microelectronics

Research Group

Electronic Components, Technology and Materials

Abstract

Capacitive micromachined ultrasonic transducers (CMUTs) with a built-in charge layer are known as a pre-charged CMUT. In our prior work, we have shown how to model and characterize the charges inside the pre-charged collapse-mode CMUT and conducted life-time test that showed that the charges trapped inside the dielectric were stable in the order of years [1]. However, our prior work focused on the use of pre-charged collapse-mode CMUTs as a way to achieve ultrasound power reception, which does not require the CMUT to be actively driven. In this work, for the first time we use pre-charged collapse-mode CMUTs with an Al2O3 charge-trapping layer to create a B-mode ultrasound image. Thus, this work shows the first example that pre-charged collapse-mode CMUTs can fully operate with only an AC voltage.